The electron-beam irradiation facility is consist of an electron accelerator with two beam lines and two irradiation rooms. The facility is used for research on irradiation effects on semiconductors and development of functional materials.

Diagram of the electron-beam irradiation facility.
Electron Accelerator
The electron accelerator has a dual beam system which supplies either vertical or horizontal beams.
Acceleration Type | Acceleration Voltage (MV) | Beam Current (mA) | Scanning Width (cm) | Scanning Frequency (Hz) |
---|---|---|---|---|
Cockcroft-Walton | 0.5–2 | 0.1–30 |
Vertical: 120 Horizontal: 60 |
200 |

Vertical section of the electron accelerator.

Photograph of the electron accelerator.
Depth-Dose Distribution
The below figure shows depth-dose distribution of electron beams in water, which is compared with that of Co-60 gamma rays. The dose rate is normalized by each maximum value.
