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Beam Engineering Section

Publications (2022)

掲載日:2022年6月14日更新
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2022

  • "Utilizing a photosensitive dry film resist in proton beam writing"

Hironori Seki, Keiya Kawamura, Hidetaka Hayashi, Yasuyuki Ishii, Nitipon Puttaraksa, Hiroyuki Nishikawa, 
Japanese Journal of Applied Physics, 61 (2022) SD1006-1-4.