2022年(令和4年)
- "Utilizing a photosensitive dry film resist in proton beam writing"
Hironori Seki, Keiya Kawamura, Hidetaka Hayashi, Yasuyuki Ishii, Nitipon Puttaraksa, Hiroyuki Nishikawa,
Japanese Journal of Applied Physics, 61 (2022) SD1006-1-4.
ビーム技術開発課
Hironori Seki, Keiya Kawamura, Hidetaka Hayashi, Yasuyuki Ishii, Nitipon Puttaraksa, Hiroyuki Nishikawa,
Japanese Journal of Applied Physics, 61 (2022) SD1006-1-4.