Specification
| Material of coiling wire | : | Ceranmic coated Pt wire (0.2mmF) |
| ・ Sheath | : | Inconel |
| ・ Working temperature | : | < 500 °C |
| ・ Cross section | : | 0.118 m2 |
| ・ Frequency Responce | : | < 250 kHz |

先進プラズマ研究開発
| Material of coiling wire | : | Ceranmic coated Pt wire (0.2mmF) |
| ・ Sheath | : | Inconel |
| ・ Working temperature | : | < 500 °C |
| ・ Cross section | : | 0.118 m2 |
| ・ Frequency Responce | : | < 250 kHz |
